Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement
نویسندگان
چکیده
Angle-resolved ellipsometry with back focal plane imaging has been found to be of increasing importance in recent industrial sensing by virtue its rich information provided at various incident and azimuthal angles. To achieve high accuracy, the angles a must accurately calibrated. For this purpose, simple robust angle calibration method based on full-field Brewster fitting is proposed, without expensive tools or complex operations. With method, image first captured from boundary reflectance through high-numerical-aperture objective. By extracting annular data image, radius-dependent ellipsometric parameters ( ? , ?<!-- ? stretchy="false">) are calculated. At end, radii mapped incidence using fitted as reference. The validated simulation experiments homemade angle-resolved ellipsometer commercial spectroscopic ellipsometer. results show that proposed provides 75% error reduction approximately generally used methods.
منابع مشابه
Principal angle, principal azimuth, and principal-angle ellipsometry of film-substrate systems
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2021
ISSN: ['2155-3165', '1559-128X']
DOI: https://doi.org/10.1364/ao.419357