Robust incident angle calibration of angle-resolved ellipsometry for thin film measurement

نویسندگان

چکیده

Angle-resolved ellipsometry with back focal plane imaging has been found to be of increasing importance in recent industrial sensing by virtue its rich information provided at various incident and azimuthal angles. To achieve high accuracy, the angles a must accurately calibrated. For this purpose, simple robust angle calibration method based on full-field Brewster fitting is proposed, without expensive tools or complex operations. With method, image first captured from boundary reflectance through high-numerical-aperture objective. By extracting annular data image, radius-dependent ellipsometric parameters ( ? , ?<!-- ? stretchy="false">) are calculated. At end, radii mapped incidence using fitted as reference. The validated simulation experiments homemade angle-resolved ellipsometer commercial spectroscopic ellipsometer. results show that proposed provides 75% error reduction approximately generally used methods.

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ژورنال

عنوان ژورنال: Applied Optics

سال: 2021

ISSN: ['2155-3165', '1559-128X']

DOI: https://doi.org/10.1364/ao.419357